JPS6453755U - - Google Patents
Info
- Publication number
- JPS6453755U JPS6453755U JP15060187U JP15060187U JPS6453755U JP S6453755 U JPS6453755 U JP S6453755U JP 15060187 U JP15060187 U JP 15060187U JP 15060187 U JP15060187 U JP 15060187U JP S6453755 U JPS6453755 U JP S6453755U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding mechanism
- rotating
- holder
- donut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150601U JPH0343232Y2 (en]) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150601U JPH0343232Y2 (en]) | 1987-09-30 | 1987-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453755U true JPS6453755U (en]) | 1989-04-03 |
| JPH0343232Y2 JPH0343232Y2 (en]) | 1991-09-10 |
Family
ID=31423892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987150601U Expired JPH0343232Y2 (en]) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343232Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56598U (en]) * | 1979-06-16 | 1981-01-06 | ||
| JPS61125170U (en]) * | 1984-10-12 | 1986-08-06 |
-
1987
- 1987-09-30 JP JP1987150601U patent/JPH0343232Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56598U (en]) * | 1979-06-16 | 1981-01-06 | ||
| JPS61125170U (en]) * | 1984-10-12 | 1986-08-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343232Y2 (en]) | 1991-09-10 |
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